Test system for wafer stepper electronics

This project involved the hard- and software development of a test system for a control board for reticle handlers used in wafer processing. The control board combines different kind of serial and parallel I/O with several safety functions. One reticle handler uses up to eight of these boards. The developed test system is based on a VME system with analog and digital I/O modules. The VME system itself is controlled by a PC with a PC to VME interface. The control board is controlled through a CAN interface. All tests are performed by a test sequencer. This sequencer executes step by step the required tests that are specified in a test script file. This software application is a LabVIEW program.

Referenced Products

ICG10
ICG10
ILOC
EDO10
EtherCat, Digital output
Small Box PC
ISBP2
Vending Machines
Machine Control
HMI
ISBP6
Vending Machines
Machine Control
HMI